11

Interface state density of SiNX:H/c-Si MIS structure

Year:
1993
Language:
english
File:
PDF, 269 KB
english, 1993
12

Atomic microstructure and electronic properties of a-SiNx:H deposited by PECVD

Year:
1991
Language:
english
File:
PDF, 246 KB
english, 1991
32

Defect formation during deposition of undoped a-Si:H by rf glow discharge

Year:
1997
Language:
english
File:
PDF, 185 KB
english, 1997
38

Investigation of SiNX:H/Si interface by capacitance method

Year:
1991
Language:
english
File:
PDF, 528 KB
english, 1991